Ultra-fast rotary ultrasonic micro-hole machining of silicon wafers: a comparative study between twist drill and diamond tools. Ansary SR, Kabir S, Cong W. Ultrasonics 2025;156:107776.

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Amedeo Smart

Independent Medical Education

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Ansary SR, Kabir S, Cong W. Ultra-fast rotary ultrasonic micro-hole machining of silicon wafers: a comparative study between twist drill and diamond tools. Ultrasonics 2025;156:107776.
PMID: 40763393